- 2-3 * 10^-7 benzenethiol for 5 minutes.
- Anneal with 10 W for 10 minutes.
- Simultaneously anneal at 10 W and dose BT for 10 minutes.
- You can either conclude here to dose Mo immediately, or you can wait until good pressure (3*10^-9 torr) is restored and anneal at 20 W for 20 min.
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