Thursday, July 31, 2014

Aligning the Sputter Gun on the STM Chamber

  1. Position the sample. Watch to make sure you do not hit the mass spec with the transfer arm. To avoid crashing, you will need to move the sample up and away from the mass spec. You should also angle the arm block 45 degrees from horizontal.  The final position should have the sample in from of the mass spec with the fine adjustments set such that the sample is as far down and out (towards the view port) as possible.
  2. Close the mid valve (if you haven't already) and the turbo valve.
  3. Make sure the ion pump is off by turning off HV1. The controller is on the bottom shelf of the cart and is leftmost. The ensures that you don't pump away the argon you are leaking in. This pump won't be turned back on until the sample is back in the STM chamber.
  4. Leak in 1*10^-4 torr Argon (and then close). Switch off the ion gauge (using the back panel switch).
  5. Turn on the sputter fun. Increase the filament current to 20 mA and the beam voltage to 3kV.
  6. Alight the beam so that you can see a blue spot on the sample. Adjust x, y, and focus to get this to align with your sample as much as possible.
  7. Open the valve to the turbo to pump away the Argon.
  8. As good pressure is restored, turn off the sputter gun.
  9. Let pump until good pressure is achieved and then you can start (probably) sputter/anneal cycles.

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