- Turn off the STM controller box completely (software off, HV off, LV off, capacitors off).
- Turn off other items such as mass spec or sputter gun controller.
- Turn off both ion pumps (located on the bottom shelf of the cart).
- Turn off both ion gauges (flip off back switch on controller (top of cart)).
- Close the turbo/chamber valve and the turbo/rough valve (both are electrically controlled so just unplug the appropriate power cords).
- Turn off the turbo (unplug) and allow to spin down.
- Turn off the rough pump.
- Give some time to allow filaments to cool.
- Leak a low pressure of nitrogen gas into the chamber via the vent valve. The bellow below the STM will deflate appropriately when the chamber reaches ambient pressure.
- Open the bottom flange to unhook the STM chains. Cover with foil when not in use.
- Disconnect the electrical connectors atop the STM.
- Open the STM flange on the table.
- Use three wire cables and attach to the ceiling crank. Slowly lift up the STM and place to rest on the STM holder.
Extra Notes: Always store the bolts and nuts in a place so that you will not have to search later to replace them. When possible, cover opened flanges with foil so as to minimize chamber contamination.
